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Roll imprint process research

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Research development process

  • Process research of Photo lithography that uses photo mask manufactured by E-beam lithography
  • Process research that reproduces micro/nano pattern manufactured for roll imprint process into soft mold and hard mold.
  • Photolithography → Soft mold manufacturing → Ni mold manufacturing → Cylinder decompression → Roll imprint
  • 01 PR Coating

  • 02 UV exposure

  • 03 PEB

  • 04 Develop and Hard baking

  • 05 UV molding(Soft mold)

  • 06 Electroforming

  • 07 Ni mold

  • 08 Roll imprint